Device and method for manufacturing carbon nanotube

ABSTRACT

There is provided a device for manufacturing carbon nanotube. The devices has a chamber support part for supporting a chamber which contains a plurality of microstructures, each of which is separated from each other by an interval; a gas providing part, connected to the chamber, for flowing at least one reactant gas, including raw material gas for manufacturing carbon nanotubes, through the chamber; a measurement part for measuring a change in physical properties of at least one of the plurality of microstructures by using detecting part; and a control part for controlling the gas providing part based on the measured change in physical properties.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a device and method for manufacturingcarbon nanotube.

2. Related Art Statements

Up to now there have been developed various techniques for formingcarbon nanotubes. However, in any of the techniques, it is verydifficult to know the nature of the generated nanotubes and correctnumber of the nanotubes, so that until now there has not been developeda technique or device for forming nanotubes at desired locations withthe desired number of nanotubes. For example, as conventionaltechnologies of the nanotube generation, there have been developedvarious methods and devices for forming carbon nanotubes at hightemperature (equal to or more than 1000 degrees centigrade). Moreover,there is a technique for generating nanotubes at low temperature (about600 degrees centigrade) by Shigeo Maruyama who is one of the inventorsof the present invention, et al. (Refer to Japanese documents: MaruyamaShigeo, “Growth of Nanotube by the cold CVD with Alcohol (experiment andsimulation)”, Journal of Japanese Association for Crystal Growthcooperation (2002), Vol. 30, No. 4, pp. 32-41; Shigeo Maruyama,“Synthetic Technology of the Single Layer Carbon Nanotube with Alcohol”,Industrial material (2003), vol. 51, No. 1, pp. 38-41; and ShigeoMaruyama et al., “High Purity Generation at low temperature by SingleLayer Carbon Nanotube with Low Temperature CCVD technique with Alcohol”,Journal of Japan Society of Mechanical Engineers (B part), (2003), vol.69, No. 680, pp. 918-924.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a device and methodfor manufacturing carbon nanotube.

In order to solve the above-mentioned problems in the conventionaldevices and methods, there is provided a method for manufacturing carbonnanotube, the method comprises the steps of:

-   -   flowing at least one reactant gas through at least one reaction        region including a plurality of microstructures, each of which        is separated from each other by an interval, and to generate and        grow at least one carbon nanotube such that a bridge is made        between the microstructures;    -   measuring a change in physical properties (for example, a minute        change in physical properties (e.g., mechanical or optical        physical properties) when a carbon nanotube bridge is built) of        at least one of the plurality of microstructures by using a        detecting means (for example, force sensor which uses a        cantilever, or the like); and    -   controlling the generation and growth of at least one carbon        nanotube based on the measured change in physical properties.

According to the present invention, it is possible to easily form carbonnanotubes at desired locations with desired number of nanotubes, becausethe nanotubes are manufactured while monitoring the forming of thenanotubes such that number and properties (for example, electricconductivity or length of a carbon nanotube) of the nanotubes generatedand grown are correctly or precisely measured by the detecting means.For instance, it is assumed that one or more detecting means fordetecting physical properties are provided in both or either amicrostructure A and a microstructure B, at which one or more bridges ofcarbon nanotubes are built therebetween, desired number of the carbonnanotubes can be formed while monitoring the growth of the carbonnanotubes by stopping the generation and growth of the carbon nanotubesif when the number of the tubes, which have bridged between themicrostructures A and B, reaches to a desired number based on themonitoring result. According to this invention, manufactured carbonnanotubes can be applied to various sensors, or various devices (e.g., afield effect transistor or optical crystal) which use nanotubes, becausecarbon nanotubes can be formed and grown at one or more desiredlocations with a desired number of tubes.

In an embodiment of the manufacturing method according to the presentinvention, the detecting means includes at least one, or combination,selected from the group consisting of a force sensor (e.g., minutevibrating cantilever type force sensor), an electrical resistance meter,optical lever method measurement instrument, and a Raman spectrometer.

According to the present embodiment, when a mechanical method usingforce sensor is employed, it is possible to measure mechanicalproperties regardless that the generated or formed carbon nanotubes areelectrically conductive or semi-conductors. Meanwhile, when electricresistance is measured, it is possible to identify or figure out thenumber and characteristics of the carbon nanotubes such that how manysemiconductor nanotubes are formed and that how many nanotubes havingelectrical conductivity are generated. Therefore, when changes in aplurality of physical properties are obtained using these variousmeasurement devices, it is possible to manufacture desired nanotubeswhile correctly or precisely grasping the number and types/kinds (e.g.,diameter of a tube, or electric conductivity, etc.) of the nanotubes.

In another embodiment of the manufacturing method according to thepresent invention, each of the plurality of microstructures includes atleast one minute vibrating cantilever.

According to the present embodiment, it is possible to measure thelengths, properties, and the number of the formed carbon nanotubes witha high degree of accuracy, because the physical properties of the minutevibrating cantilever slightly varies depending on the minute stimulusarising from the nanotube generation (i.e., a nanotube bridge isfinished up between the cantilevers/microstructures).

Meanwhile, silicone is preferable as a material to form a cantilever,but at 1000 degrees centigrade, in which normal nanotube forming methodis performed, it is difficult to measure the mechanical characteristicsof the silicone. However, when the above-described Low Temperature CCVDtechnique with alcohol by Maruyama is employed, nanotubes can be formedat low temperature such as approximately 600 degrees centigrade. Thistemperature, 600 degrees centigrade, is within the range (it isdesirable to be equal or less than 700 degrees centigrade) of theelastic deformation of silicone. Therefore, if the Low Temperature CCVDtechnique is used, the minute changes in physical properties of thecantilever may sufficiently be measured. Hence, in this embodiment, whenmicrostructures having cantilevers made of silicone are employed, it ispreferable that the method includes a step of controlling temperature ofa reaction region, at which the microstructures having cantileversexist, to be within the range from approximately 600 to approximately700 degrees centigrade.

In still another embodiment of the manufacturing method according to thepresent invention, the method further comprises providing vibration tothe minute vibrating cantilever from without or from outside of thecantilever by using an electrostatic actuator or a piezoelectricactuator.

In yet another embodiment of the manufacturing method according to thepresent invention, there are a plurality of minute vibratingcantilevers, each having a different resonance frequency, the methodfurther comprises adjusting a frequency of the provided vibration fromwithout by the providing vibration step according to a desired resonancefrequency of the minute vibrating cantilevers.

In yet another embodiment of the manufacturing method according to thepresent invention, there are an array of reaction regions, in otherwords reaction regions are accumulated on large scale to form the array,the method further comprises controlling at least one selected from thegroup consisting of heating of a reaction region, flow rate of reactantgas, and electric field for every reaction region.

According to the present embodiment, it is possible to manufacture onlythe desired number of the nanotubes having desired properties in a largequantity. For instance, when only certain reaction regions, at whichmicrostructures exist where one or more nanotube bridges should be builttherebetween, are heated according to this method, only the certainreaction regions are activated, and therefore this makes remainingreaction regions to not generate or form the carbon nanotubes in theseremaining non-activated reaction regions. In addition, due to thatelectric filed is applied to spaces between certain microstructures atwhich one or more nanotubes bridges should be built therebetween, adirection of the growth of the nanotubes can be controlled.

In yet another embodiment of the manufacturing method according to thepresent invention, the heating of a reaction region done by a spot lamp,which locally heats by irradiating only a limited part of the reactionregions, or a heater having a resistance heating element.

In yet another embodiment of the manufacturing method according to thepresent invention, each of reaction regions included in the array isprovided in each of micro flow channels which are provided in asubstrate by MEMS (Micro electro mechanical systems) technology.

In yet another embodiment of the manufacturing method according to thepresent invention, each of the reaction regions is connected to aplurality of micro flow channels in a different direction, and themethod further comprises controlling a flow direction of the reactantgas which passes through the reaction region by adjusting a flow of thereactant gas for every micro flow channel, and to generate and grow theat least one carbon nanotube.

According to this embodiment, it is possible to form and grow a nanotubein desired direction by flowing reactant gas in the desired directionthrough which a nanotube should be formed and grown, because thenanotube tends to grow according to (i.e., along with) the flowdirection of a reactant gas.

In yet another embodiment of the manufacturing method according to thepresent invention, the method further comprises the steps of:

-   -   determining whether or not each of the generated and grown        carbon nanotubes is a desired one based on the measured change        in physical properties; and    -   burning up only one or more carbon nanotubes, which are        determined that each of which is not desired one in the        determining step, of the generated and grown carbon nanotubes        either by applying electric current to the one or more        non-desired carbon nanotubes via electrodes provided or disposed        in the microstructures or by flowing an oxygen gas through the        one or more reaction regions in which the one or more        non-desired carbon nanotubes are formed therein.

In yet another embodiment of the manufacturing method according to thepresent invention, the generation and growth of the at least one carbonnanotube is done in or under a non-oxidizing atmosphere (for example, byflowing an argon gas containing hydrogen through the reaction regions).

According to this embodiment, changes in physical properties such asoptical or mechanical characteristics by the oxidation reaction of theminute structure can be avoided by preventing the microstructures frombeing oxidized, so that measurement error of the change in physicalproperties can be confined within a minimum range.

In an alternative embodiment, the method may further comprisescalculating compensated values regarding mechanical properties from atemperature and an elapsed time by compensating the error of change inmechanical properties by oxidative reaction from heat and oxygen duringnanotube forming (surfaces of the silicone will be converted into oxidesilicone by heating).

By way of easy explanation the aspect of the present invention has beendescribed as the methods, however it is understood that the presentinvention may be realized as devices corresponding to the methods.

For example, according to another aspect of the present invention, thereis provided a device for manufacturing carbon nanotube, the devicecomprises:

-   -   a chamber support means for supporting a chamber which contains        a plurality of microstructures, each of which is separated from        each other by an interval or distance;    -   a gas providing means, connected to the chamber, for flowing at        least one reactant gas, including raw material gas for        manufacturing carbon nanotubes, through the chamber;    -   a measurement means for measuring a change in physical        properties of at least one of the plurality of microstructures        by using a detecting means; and    -   a control means for controlling the gas providing means based on        the measured change in physical properties.

In another embodiment of the manufacturing device according to thepresent invention, the device further comprises:

-   -   at least one heating means for heating the plurality of        microstructures in the chamber; and/or    -   an electric field providing means for providing electric field        to the plurality of microstructures in the chamber via at least        one electrode connected to any of the plurality of        microstructures,    -   and the controlling means controls the heating means and/or the        electric field providing means based on the measured change in        physical properties.

In still another embodiment of the manufacturing device according to thepresent invention, the detecting means includes at least one selectedfrom the group consisting of a force sensor, an electrical resistancemeter, measurement instrument using optical lever method, and a Ramanspectrometer.

In yet another embodiment of the manufacturing device according to thepresent invention, each of the plurality of microstructures includes atleast one minute vibrating cantilever, i.e., a cantilever which minutelyvibrates.

In yet another embodiment of the manufacturing device according to thepresent invention, the device further comprises:

-   -   either an electrostatic actuator or a piezoelectric actuator for        providing vibration to the minute vibrating cantilever from        without, or outside of the cantilever.

In yet another embodiment of the manufacturing device according to thepresent invention, there are a plurality of minute vibratingcantilevers, each having a different resonance frequency, the devicefurther comprises a controlling means for controlling electrostaticactuator or a piezoelectric actuator to adjust a frequency of theprovided vibration from without, or outside the cantilever, according toa desired resonance frequency of the minute vibrating cantilevers.

In yet another embodiment of the manufacturing device according to thepresent invention, the device further comprises a temperature controlmeans for controlling temperature of a reaction region, at which themicrostructures having cantilevers exist, to be within the range fromabout 600 to 700 degrees centigrade.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating a basic configuration of anembodiment of the manufacturing device for manufacturing carbonnanotube;

FIG. 2 is a cross sectional view of the vacuum chamber (i.e., quartztube) to use in the nanotube manufacturing technique according to thepresent this invention;

FIG. 3 is a schematic perspective view depicting a pair ofmicrostructures to use in the method for manufacturing carbon nanotubeaccording to the present invention;

FIG. 4 is a schematic perspective view showing a part of a manufacturingdevice including an array of the reaction regions to use in the methodfor manufacturing carbon nanotube according to the present invention;and

FIGS. 5A and 5B are schematic block diagrams illustrating an alternativeembodiment of reaction regions to use in the method for manufacturingcarbon nanotube according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Several preferred embodiments of the present invention will be describedwith reference to the accompanying drawings.

FIG. 1 is a schematic diagram illustrating a basic configuration of anembodiment of the manufacturing device for manufacturing carbonnanotube. As shown in FIG. 1, a manufacturing device comprises: a vacuumchamber (quartz tube) 1 capable of being optically observed fromwithout; a reaction region 3 (which will be explained in detail in FIGS.2 and 3), at which disposed a pair of cantilevers which are facing eachother, in the vacuum chamber 1; a spot lamp 5 for heating the reactionregion to stimulate the growth of a carbon nanotube; a reactant gasfeeding means 7, which is connected to one end of the vacuum chamber 1,for feeding reactant gas; a vacuum pump 9, which is connected to otherend of the chamber, for vacuuming the chamber to recover the reactantgas; an objective lens 11 for observing the generation and growth of acarbon nanotube; an argon laser 13; an optical filter 15; and a splitphotodiode 17.

The reactant gas feeding means 7 may feed or provide not only a reactantgas including alcohol vapor (source of carbon), which mainly consistingof carbon and hydrogen, as a raw material of nanotubes, but also anargon or hydrogen gas. Non-oxidizing atmosphere is used to preventmembers of the reaction region, such as cantilevers or carbon nanotube,from alternation or degradation. When a reactant gas is fed into thevacuum chamber during heating the reaction region 3, one or more carbonnanotubes start to generate and grow from a front edge of one cantilevertoward a front edge of other cantilever. When just a carbon nanotube isconnected to the other cantilever, in other words a carbon nanotubebridge is finished up or built between the two cantilevers, a position,mechanical properties or optical properties of the both of either of thecantilever would changes. These changes in physical properties aremeasured using a force sensor using one or more cantilevers(members/elements other than cantilevers are not illustrated), or ameasurement system for measuring minute change of position utilizing anoptical lever method with an optical system having an argon laser, anoptical filter and a split photodiode. The growth and generation of acarbon nanotube(s) can be controlled by stopping supply of the reactantgas, or by increasing the heat of the reaction region to prompt oractivate the growth of the nanotubes.

FIG. 2 is a cross sectional view of the vacuum chamber (i.e., quartztube) to use in the nanotube manufacturing technique according to thepresent this invention. Referring to FIG. 2, there is provided areaction region 20 for growth a carbon nanotube(s) and microstructures,i.e., cantilevers 22 a and 22 b, which are facing each other, aredisposed in the reaction region. The cantilever 22 a is connected to anelectrostatic actuator for vibrating the cantilever. As shown FIG. 2, achange in physical properties, for example optical vibrations, ismeasured while generating the carbon nanotube.

In this embodiment an optical system for measuring the opticalvibrations (optical lever) is employed. This optical system mainlyincludes a laser spot irradiation part 24 for irradiating a spot oflaser light and a measuring part 26 using a split photodiode.Optionally, there is provided an optical filter and thus it can bedistinguished between the heat ray from the spot lamp and the laserlight from the laser spot irradiation part. The laser irradiation part24 can be used as a light source for a Raman absorption measurement, butadditional light source and measurement device for Raman absorption canbe provided.

According to the number of carbon nanotubes to desire to measure orgenerate, a distance between the microstructures and a mechanicalresonance frequency of each microstructure can be varied. It ispreferable to set the sensitivity of a part to low when the part is aplace to want to form a large amount of nanotubes, and it is preferableto set the sensitivity of a part to high when the part is a place towant to form or generate a small amount of nanotubes. It is sufficientthat change in physical properties of either one side of thecantilevers, at which a nanotube bridge is formed therebetween, can bemeasured. A vibration measurement means can be provided in a cantilever,which is the other side of being bridged. A vibrating means forvibrating a cantilever(s) from without can be an electrostatic actuatoror a piezoelectric actuator. A piezoelectric actuator 30 applies avoltage between the cantilever to desire to be vibrated and any membersuch as a substrate, and to actuate the cantilever by electrostaticforce. This piezoelectric actuator can be located in the vacuum chamberor quartz tube. When a vibration field is provided from without oroutside and a cantilever which resonates with vibrations by thevibration field can be measured, there is no need to dispose theactuator in the vacuum tube. For example, the vacuum chamber or quartztube for reaction can be vibrated outside the chamber using variousfrequencies. Each microstructure has one or more electrodes (not shownin FIG. 2) and an electrical resistance meter 32 measures a change inresistance using the electrodes or the electrostatic actuator 30vibrates or oscillates the microstructures using the electrodes. It ispreferable that the electrodes are made of only substances, such astitanium or chrome, which do not have influence on the purification ofcarbon nanotubes.

FIG. 3 is a schematic perspective view depicting a pair ofmicrostructures to use in the method for manufacturing carbon nanotubeaccording to the present invention. As shown in FIG. 3, there ismicrostructures 40 a and 40 b having cantilevers 41 a and 41 brespectively, in which ends of respective cantilever beams are facingeach other, and the ends or edges of the beams are disposed in thereaction region. One or more nanotubes are generated or formed betweenthe cantilevers 41 a and 41 b. The microstructures 40 a and 40 b has athree-layer structure consisting of cantilevers 41 a and 41 b, made ofsilicone, insulation layers 43 a and 43 b, and substrates 45 a and 45 b,which are made of silicone and support the insulation layers andcantilevers, respectively. In order to be sensitive to changes ofphysical properties of the cantilever, the cantilevers are extremelythinned. In a similar fashion, in order to increase the sensitive, it ispreferable to elongate the beams of the cantilevers as much as possible.When a voltage is applied between the cantilever and substrate, thecantilever starts to vibrate up and down because the cantilever is verythin and this vibration is measured using various types of sensorsduring nanotube generation, and thus the status of the nanotubemanufacture can be grasped appropriately. In this embodiment, cantilever41 a is kept away from the cantilever 41 b by approximately 5micrometers and the beam of the cantilever 41 a is vibrated up and downby approximately 1.5 micrometers during measuring. In addition, thecantilever beam is 170 micrometers in length, 10 micrometers in width,and 2 micrometer in thickness. The original values of mechanicalphysical properties of the lever are spring constant k=0.7[N/m],resonant frequency f=90 kHz. Although Shift or change of physicalproperties varies depending on kind, characteristics and length of ananotube when a carbon nanotube bridge is built or just connected, inthis embodiment shift values per nanotube are approximatelyΔk=0.004[N/m] and Δf=270 Hz and these values can sufficiently bemeasured using known various sensors or measurement devices.

FIG. 4 is a schematic perspective view showing a part of a manufacturingdevice including an array of the reaction regions to use in the methodfor manufacturing carbon nanotube according to the present invention. Asshown in FIG. 4, a substrate 50 is processed to provide a plurality ofmicro flow channels 52 a, 52 b, and 52 c using the MEMS technology (Forconvenience, only three flow channels are illustrated, but actually agreat number of micro flow channels are provided). The micro flowchannels are connected to gas providing means 54 a, 54 b, and 54 c,respectively, which control a flow rate separately. The micro flowchannels have reaction regions 56 a, 56 b, and 56 c, respectively (whichhave a plurality of microstructures, not shown). In addition, there areprovided spot lamps 58 a, 58 b, and 58 c for heating each reactionregions separately. A desired local part (e.g., only a specificcantilever) can be locally heated by adjusting focus of a spot of eachspot lamp. They can be an array of lamps or each heating spot lamp(i.e., its focus point or target area) can be controlled from outside.Instead of spot lamps, each reaction region has a resistance unit (notillustrated) to heat its area with resistance heating. Also, the arrayof the minute resistor can be used. In this way, the manufacturingdevice can be arranged with more than one micro flow channels like anarray and a device for controlling flow of a reactant gas and heating ineach of channel can be utilized. In the FIG. 4 it is not illustrated butthe flow channel top can be sealed with the transparent quartz panel orthe like. In this connection, the minute flow channels may be anintegral construction having both a substrate to desire to form tubesand micro flow channels. Alternatively, the flow channel can be anothermember, which can be removed from the substrate if tube growth finished.The gas feeding means may use not only alcohol gas, which is a maincomponent of the reactant gas, but also various gasses such as an argongas, a hydrogen gas, or an oxygen gas. In addition, there are provided agas flow rate control means in the channels, and thus the gas flow ratecan be varied or regulated using these gas flow rate control meansdepending on measured changes in physical properties which are obtainedduring generating and growing carbon nanotubes.

FIG. 5A is a schematic block diagram illustrating an alternativeembodiment of reaction regions to use in the method for manufacturingcarbon nanotube according to the present invention. As shown in FIG. 5A,a reaction region 60 including a plurality of microstructures areconnected to a plurality of minute flow channel from differentdirections. These minute flow channels includes inlets 62 a, 62 b and 62c for feeding a reactant gas and outlets 64 a, 64 b and 64 c fordischarging a gas. Every micro flow channel has one or more valves. Forinstance when only a pair of valves, which are located in the inlet 62 aand the outlet 64 a respectively, are opened, a reactant gas flowthrough the reaction region 60 in one direction indicated by the arrowat A in FIG. 5. Therefore the gas flows along with the dotted lines withthe arrows in FIG. 5B in one direction and one or more nanotubes formsalong with the flow direction. Thus one or more carbon nanotube can beformed in a desired direction. FIG. 5B is an enlarged view of FIG. 5A inthat. As shown in FIG. 5B, the reaction region 60 includes a pluralityof microstructures (group A) in a left side and a plurality ofmicrostructures (group B) in a right side, which face to the group B. Ifgas is fed to the reaction region along with the dotted lines witharrows, carbon nanotubes are generated and grown along with thedirection of the gas flow (i.e., dotted lines) such as illustratedcarbon nanotubes 66 a and 66 b. Because the value of the vibrationphysical properties of each minute structure depends on the length ofthe completed form of a tube (i.e., carbon nanotube bridge), it ispossible to easily and simply grasp in real time whether or not thedesired tube formed in the desired combination of themicrostructures/cantilevers. Also, in a similar principle, when aplurality of electrodes are disposed around or adjacent to the reactionregion (cantilevers), it is possible to form and grow carbon nanotubesin a desired direction by adjusting the direction of applied electricfield.

Further, it should be understood that the detailed description andspecific examples, while indicating preferred embodiments of theinvention, are given by way of illustration only, not to be used tointerpret the scope of the invention. Various changes and modificationswithin the spirit and scope of the invention will become apparent tothose skilled in the art from this detailed description.

1. A method for manufacturing carbon nanotube, the method comprising thesteps of: flowing at least one reactant gas through at least onereaction region including a plurality of microstructures, each of whichis separated from each other by an interval, and to generate and grow atleast one carbon nanotube such that a bridge is made between themicrostructures; measuring a change in physical properties of at leastone of the plurality of microstructures by using detecting means; andcontrolling the generation and growth of at least one carbon nanotubebased on the measured change in physical properties.
 2. The methodaccording to claim 1, wherein the detecting means includes at least oneselected from the group consisting of a force sensor, an electricalresistance meter, optical lever method measurement instrument, and aRaman spectrometer.
 3. The method according to claim 1, wherein each ofthe plurality of microstructures includes at least one minute vibratingcantilever.
 4. The method according to claim 3, further comprisingproviding vibration to the minute vibrating cantilever from without byusing an electrostatic actuator or a piezoelectric actuator.
 5. Themethod according to claim 4, wherein there are a plurality of minutevibrating cantilevers, each having a different resonance frequency, themethod further comprising adjusting a frequency of the providedvibration from without by the providing vibration step according to adesired resonance frequency of the minute vibrating cantilevers.
 6. Themethod according to claim 4, wherein there are an array of reactionregions, the method further comprising controlling at least one selectedfrom the group consisting of heating of a reaction region, flow rate ofreactant gas, and electric field for every reaction region.
 7. Themethod according to claim 6, wherein the heating of a reaction regiondone by a spot lamp, which locally heats by irradiating only a limitedpart, or a heater having a resistance heating element.
 8. The methodaccording to claim 6, wherein each of reaction regions included in thearray is provided in each of micro flow channels which are provided in asubstrate by MEMS technology.
 9. The method according to claim 8,wherein each of the reaction regions is connected to a plurality ofmicro flow channels in a different direction, and wherein the methodfurther comprising controlling a flow direction of the reactant gaswhich passes through the reaction region by adjusting a flow of thereactant gas for every micro flow channel, and to generate and grow theat least one carbon nanotube.
 10. The method according to claim 1,further comprising the steps of: determining whether or not each of thegenerated and grown carbon nanotubes is a desired one based on themeasured change in physical properties; and burning up only one or morecarbon nanotubes, which are determined that each of which is not desiredone in the determining step, of the generated and grown carbon nanotubeseither by applying electric current to the one or more non-desiredcarbon nanotubes via electrodes provided in the microstructures or byflowing an oxygen gas through the reaction region in which the one ormore non-desired carbon nanotubes are formed therein.
 11. The methodaccording to claim 1, wherein the generation and growth of the at leastone carbon nanotube is done in a non-oxidizing atmosphere.
 12. A devicefor manufacturing carbon nanotube, comprising: chamber support means forsupporting a chamber which contains a plurality of microstructures, eachof which is separated from each other by an interval; gas providingmeans, connected to the chamber, for flowing at least one reactant gas,including raw material gas for manufacturing carbon nanotubes, throughthe chamber; measurement means for measuring a change in physicalproperties of at least one of the plurality of microstructures by usingdetecting means; and control means for controlling the gas providingmeans based on the measured change in physical properties.
 13. Thedevice according to claim 12, further comprising: at least one heatingmeans for heating the plurality of microstructures in the chamber;and/or electric field providing means for providing electric field tothe plurality of microstructures in the chamber via at least oneelectrode connected to any of the plurality of microstructures, andwherein the controlling means controls the heating means and/or theelectric field providing means based on the measured change in physicalproperties.
 14. The device according to claim 12, wherein the detectingmeans includes at least one selected from the group consisting of aforce sensor, an electrical resistance meter, optical lever methodmeasurement instrument, and a Raman spectrometer.
 15. The deviceaccording to claim 12, wherein each of the plurality of microstructuresincludes at least one minute vibrating cantilever.
 16. The deviceaccording to claim 12, further comprising: either an electrostaticactuator or a piezoelectric actuator for providing vibration to theminute vibrating cantilever from without.
 17. The device according toclaim 16, wherein there are a plurality of minute vibrating cantilevers,each having a different resonance frequency, the device furthercomprising controlling means for controlling electrostatic actuator or apiezoelectric actuator to adjust a frequency of the provided vibrationfrom without according to a desired resonance frequency of the minutevibrating cantilevers.